Ferroelectric memory devices having expanded plate lines

ABSTRACT

A ferroelectric memory device includes a microelectronic substrate and a plurality of ferroelectric capacitors on the substrate, arranged as a plurality of rows and columns in respective row and column directions. A plurality of parallel plate lines overlie the ferroelectric capacitors and extend along the row direction, wherein a plate line contacts ferroelectric capacitors in at least two adjacent rows. The plurality of plate lines may include a plurality of local plate lines, and the ferroelectric memory device may further include an insulating layer disposed on the local plate lines and a plurality of main plate lines disposed on the insulating layer and contacting the local plate lines through openings in the insulating layer. In some embodiments, ferroelectric capacitors in adjacent rows share a common upper electrode, and respective ones of the local plate lines are disposed on respective ones of the common upper electrodes. Ferroelectric capacitors in adjacent rows may share a common ferroelectric dielectric region. Related fabrication methods are discussed.

RELATED APPLICATIONS

The present application is a continuation of U.S. application Ser. No.10/136,991, filed May 2, 2002 now U.S. Pat. No. 6,844,583, entitledFerroeleciric Memory Devices Having Expanded Plate Lines, the disclosureof which is hereby incorporated herein by reference. This applicationalso claims the benefit of Korean Patent Application Nos. 2001-3624 and2002-06192, filed on Jun. 26, 2001 and on Feb. 4, 2002, respectively,the contents of which are herein incorporated by reference in theirentirety.

BACKGROUND OF THE INVENTION

The present invention relates to memory devices and methods offabrication therefor, and more particularly, to ferroelectric memorydevices and methods of fabrication therefor.

Typical ferroelectric memory devices can retain data even whende-energized. Similar to DRAMs and SRAMs, ferroelectric memory devicestypically operate with a low power supply voltage. Thus, ferroelectricdevices are attractive for use in smart cards or the like.

A conventional method of fabricating a ferroelectric memory device willbe described with reference to FIG. 1 through FIG. 3. Referring now toFIG. 1, a device isolation layer 13 is formed in a predetermined area ofa semiconductor substrate 11 to define an active region. A plurality ofinsulated gate electrodes 15, i.e., local word lines, is formed acrossthe active region and the device isolation layer 13. Thereafter,impurities are implanted into the active region between the gateelectrodes 15 to form source/drain regions 17 s and 17 d. A first lowerinterlayer insulating layer 19 is formed on the resultant structure. Thefirst lower interlayer insulating layer 19 is patterned to form storagenode contact holes that expose the source regions 17 s. Contact plugs 21are then formed in the storage node contact holes.

Referring to FIG. 2, ferroelectric capacitors 32 are arrayed on thecontact plugs 21. Each of the ferroelectric capacitors 32 is composed ofa bottom electrode 27, a ferroelectric layer 29, and a top electrode 31.Each of the bottom electrodes 27 covers a respective contact plug 21. Afirst upper interlayer insulating layer 33 is formed on theferroelectric capacitors 32. A plurality of main word lines 35 are thenformed on the first upper interlayer insulating layer 33. Each of themain word lines 35 generally controls four local word lines 15.

Referring now to FIG. 3, a second upper interlayer insulating layer 37is formed on the main word lines 35. The second and first interlayerinsulating layers 37 and 33 are patterned to form via holes 39 thatexpose the top electrodes 31. A plurality of plate lines 41 are formedthat contact the top electrodes 31 through the via holes 39. The platelines 41 are arranged to be parallel with the word lines 35.

To reduce an aspect ratio of each of the via holes 39, wet and dry etchtechniques can be used. In this case, the via hole 39 tends to have aninclined upper sidewall 39 a, as shown in FIG. 3. Unfortunately,excessive wet-etch may result in exposure of the main word lines 35.

As another approach to reduce an aspect ratio of the via hole 39, thediameter of the via hole 39 can be increased. However, a spacing betweenthe via hole 39 and an adjacent main word line 35 tends to decrease withan increase in integration level. This makes precise alignment during aphoto process for forming the via hole 39 desirable.

According to the foregoing prior art, decreasing an aspect ratio of thevia holes leads to a strong probability that the main word lines will beexposed. Therefore, it is hard to avoid an electric short between theplate line and the main word line as well as a contact failure betweenthe top electrode and the plate line.

SUMMARY OF THE INVENTION

According to some embodiments of the present invention, a ferroelectricmemory device includes a microelectronic substrate and a plurality offerroelectric capacitors on the substrate, arranged as a plurality ofrows and columns in respective row and column directions. A plurality ofparallel plate lines overlie the ferroelectric capacitors and extendalong the row direction, wherein a plate line contacts ferroelectriccapacitors in adjacent rows, for example, at least two adjacent rows. Atleast one of the plate lines may contact the ferroelectric capacitors,which are arrayed in at least two adjacent rows and at least one column.In some embodiments, the ferroelectric capacitors include an upperelectrode, and the plurality of plate lines include a plurality of localplate lines that contact the upper electrodes of the ferroelectriccapacitors. The plurality of plate lines may include a plurality oflocal plate lines, and the ferroelectric memory device may furtherinclude an insulating layer disposed on the local plate lines and aplurality of main plate lines disposed on the insulating layer andcontacting the local plate lines through openings in the insulatinglayer. Alternatively, a plurality of local plate patterns may be arrayedalong the row and column directions instead of the local plate lines. Inthis case, each of the local plate patterns contacts the upperelectrodes of the ferroelectric capacitors, which are arrayed in atleast two adjacent rows and at least one column. Preferably, therespective local plate patterns covers four upper electrodes of fourferroelectric capacitors, which are arrayed in two adjacent rows and twoadjacent columns. In some embodiments, ferroelectric capacitors inadjacent rows share a common upper electrode, and respective ones of theplate lines are disposed on respective ones of the common upperelectrodes. Ferroelectric capacitors in adjacent rows may share a commonferroelectric dielectric region.

According to other embodiments of the present invention, a ferroelectricmemory device is fabricated. A plurality of ferroelectric capacitors isformed on a microelectronic substrate, the plurality of ferroelectriccapacitors arranged as a plurality of rows and columns in respective rowand column directions. A plurality of parallel plate lines are formed onthe substrate, overlying the ferroelectric capacitors and extendingalong the row direction, wherein a plate line contacts ferroelectriccapacitors in at least two adjacent rows. The plate lines may includelocal plate lines. An insulating layer may be formed on the local platelines, and a plurality of main plate lines may be formed on theinsulating layer, respective ones of which contact respective ones ofthe local plate lines through openings in the insulating layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1-3 are cross-sectional views illustrating a conventional processfor fabricating a ferroelectric memory device.

FIG. 4 is a top plan view of a ferroelectric memory device according toembodiments of the present invention.

FIG. 5 is a perspective view illustrating a ferroelectric memory deviceaccording to some embodiments of the present invention.

FIG. 6 is a perspective view illustrating a ferroelectric memory deviceaccording to further embodiments of the present invention.

FIG. 7 is a perspective view illustrating a ferroelectric memory deviceaccording to still other embodiments of the present invention.

FIGS. 8-14 are cross-sectional views of intermediate fabricationproducts illustrating operations for fabricating a ferroelectric memorydevice according to some embodiments of the present invention.

FIGS. 15-19 are cross-sectional views of intermediate fabricationproducts illustrating operations for fabricating a ferroelectric memorydevice according to other embodiments of the present invention.

FIGS. 20-24 are cross-sectional views of intermediate fabricationproducts illustrating operations for fabricating a ferroelectric memorydevice according to further embodiments of the present invention.

FIG. 25 is a plan view of a ferroelectric memory device according tofurther embodiments of the present invention.

FIG. 26 is a cross-sectional view illustrating a ferroelectric memorydevice and fabrication operations therefor according to additionalembodiments of the present invention.

DETAILED DESCRIPTION

The present invention will now be described more fully hereinafter withreference to the accompanying drawings, in which typical embodiments ofthe invention are shown. The invention may, however, be embodied indifferent forms and should not be construed as limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the invention to those skilled in the art. In thedrawings, the thickness of layers and regions are exaggerated forclarity. It will also be understood that when a layer is referred to asbeing “on” another layer or substrate, it can be directly on the otherlayer or substrate, or intervening layers may also be present. Likenumbers refer to like elements throughout.

Referring now to FIG. 4 and FIG. 5, a device isolation layer 53 islocated at a predetermined area of a semiconductor substrate 51 todefine a plurality of active regions 53 a. A plurality of insulated gateelectrodes 57 (i.e., a plurality of word lines) are arranged across theactive regions 53 a and the device isolation layer 53. The gateelectrodes 57 are parallel and extend along a row direction (y-axis).Each of the active regions 53 a intersects a couple of gate electrodes57 to divide each of the active regions 53 a into three parts. A commondrain region 61 d is formed at an active region 53 a between the pair ofthe gate electrodes 57. Source regions 61 s are formed at active regions53 a that are located at both sides of the common drain region 61 d.Cell transistors are formed at points where the gate electrodes 57intersect the active regions 53 a. The cell transistors are arrayedalong a column direction (x-axis) and the row direction (y-axis).

The cell transistors are covered with a lower interlayer insulatinglayer 74. A plurality of bit lines 71 are arranged in the lowerinterlayer insulating layer 74, transverse to the word lines 57. The bitlines 71 are electrically connected to the common drain regions 61 dthrough bit line contact holes 71 a. The source regions 61 s are exposedby storage node contact holes 75 a that penetrate the lower interlayerinsulating layer 74. Preferably, an upper sidewall of the storage nodecontact hole 75 a has a sloped profile. Each of the storage node contactholes 75 a is filled with contact plugs 75. An upper diameter of thecontact plug 75 is larger than a lower diameter thereof, as shown inFIG. 5.

A plurality of ferroelectric capacitors 82 (CP shown in FIG. 4) arearrayed along the column direction (x-axis) and the row direction(y-axis). Each of the ferroelectric capacitors 82 includes a bottomelectrode 77, a ferroelectric layer pattern 79, and a top electrode 81.Respective ones of the bottom electrodes 77 are located on respectiveones of the contact plugs 75. As a result, the bottom electrodes 77 areelectrically connected to the source regions 61 s through the contactplugs 75. Preferably, gaps between the ferroelectric capacitors 82 arefilled with insulating layer patterns 85 a.

Preferably, a hydrogen barrier layer pattern 83 a is disposed betweenthe insulating layer pattern 85 a and at least the ferroelectric layerpatterns 79. Preferably, the hydrogen barrier layer pattern 83 a is madeof titanium oxide (TiO₂), aluminum oxide (Al₂O₃), silicon nitride(Si₃N₄), or a combination thereof. This makes it possible to preventhydrogen atoms from penetrating into the ferroelectric layer pattern 79.If hydrogen atoms are implanted into the ferroelectric pattern 79, areliability of the ferroelectric pattern 79 may be degraded. Forexample, if hydrogen atoms are injected into a ferroelectric layer suchas PZT (Pb, Zr, TiO₃) layer, oxygen atoms in the PZT layer may reactwith the hydrogen atoms to cause an oxygen vacancy therein. Owing to theoxygen vacancy, a polarization characteristic of the ferroelectric layermay deteriorate and cause malfunction. If hydrogen atoms are captured ininterface traps between the ferroelectric layer pattern and top/bottomelectrodes, an energy barrier therebetween may be lowered. Accordingly,leakage current characteristics of the ferroelectric capacitors may bedeteriorated.

A plurality of local plate lines 87 (PL shown in FIG. 4) are arranged onthe ferroelectric capacitors 82 and the insulating layer pattern 85 a.The local plate lines 87 may include a metal, a conductive metal oxide,a conductive metal nitride or a combination thereof. For example, thelocal plate lines 87 may include titanium aluminum nitride (TiAlN),titanium (Ti), titanium nitride (TiN), iridium (Ir), iridium oxide(IrO₂), platinum (Pt), ruthenium (Ru), ruthenium oxide (RuO₂), aluminumor combination thereof. The local plate lines 87 extend along the rowdirection (y-axis). A respective one of the local plate lines 87 coversa respective pair of adjacent rows of ferroelectric capacitors 82. Thelocal plate line 87 directly contacts with the top electrodes 81 of theunderlying adjacent rows of capacitors 82. Preferably, the local plateline 87 directly contact the top electrodes 81 of the capacitors 82,which are arrayed in at least two adjacent rows and at least one column.The local plate lines 87 are covered with an upper interlayer insulatinglayer. The upper interlayer insulating layer may include first andsecond upper interlayer insulating layers 89 and 93.

A plurality of main word lines 91 may be disposed between the first andsecond upper interlayer insulating layers 89 and 93. The main word lines91 are extended along the row direction (y-axis), thereby being parallelwith the local plate lines 87. Generally, each of the main word lines 91controls four word lines 57 using a decoder. A main plate line 97 may bearranged in the upper interlayer insulating layer between the main wordlines 91. The main plate lines 97 are electrically connected to thelocal plate lines 87 through a slit-type via hole 95 penetrating theupper interlayer insulating layer. The slit-type via hole 95 extends inparallel along the row direction (y-axis) and exposes the local plateline 87. A width of the slit-type via hole 95 is larger than a diameterof the via hole (39 of FIG. 3) of the prior art. The local plate line 87directly contacts the upper surfaces of the top electrodes 81.

In some embodiments, a plate line may be composed of the local plateline 87 and the main plate line 97. In other embodiments, the plate linemay be composed of only the local plate line 87 or only the main plateline 97. In the event that the plate line is composed of only the mainplate line 97, the main plate line 97 is in direct contact with the topelectrodes 81 of the ferroelectric capacitors, which are arrayed in atleast two adjacent rows, through the slit-type via hole 95. Also, if theplate line is composed of only the main plate line 97, the insulatinglayer pattern 85 a is preferably made of material having an etchselectivity with respect to the upper interlayer insulating layer. Forexample, if the upper interlayer insulating layer is made of siliconoxide, the insulating pattern 85 a is preferably made of siliconnitride.

A ferroelectric memory device according to second embodiments of theinvention is shown in FIG. 6. In these embodiments, cell transistors, alower interlayer insulating layer, and contact plugs have the sameconfiguration as those in the embodiments of FIG. 5. Further descriptionof these components is therefore omitted in light of the foregoingdescription.

Referring to FIG. 4 and FIG. 6, a plurality of ferroelectric capacitorscovering the contact plugs 75 are located on the lower interlayerinsulating layer 74. Therefore, the ferroelectric capacitors are2-dimensionally arranged along the row and column directions. Each ofthe ferroelectric capacitors includes a bottom electrode 101, aferroelectric layer pattern 103, and a common top electrode 109. Thecommon top electrode 109 contacts the ferroelectric layer patterns 103of the ferroelectric capacitors, which are arrayed in at least twoadjacent rows and at least one column. In more detail, the common topelectrode 109 is extended to cover ferroelectric layer patterns 103 inadjacent rows. The common top electrode 109 extends along the rowdirection, similar to the local plate line PL shown in FIG. 4.Preferably, gaps between the ferroelectric patterns 103 and between thebottom electrodes 101 are filled with an insulating layer pattern 107 a.Preferably, a hydrogen barrier layer pattern 105 a is disposed betweenthe lower insulating layer pattern 107 a and at least the ferroelectriclayer pattern 103.

The common top electrode 109 is covered with an upper insulating layer111. The upper insulating layer 111 has a slit-type contact hole thatexposes the common top electrode 109. The slit-type contact hole extendsalong the row direction (y-axis) and is covered with a local plate line113 (PL shown in FIG. 4). The local plate line 113 is electricallyconnected to the common top electrode 109 through the slit-type contacthole. Alternatively, a plurality of local plate patterns may be usedinstead of the single local plate line 113. In this case, each of thelocal plate patterns is in contact with the common top electrodes 109 ofthe ferroelectric capacitors, which are arrayed in at least two adjacentrows and at least one column. The local plate line 113 may be composedof the same material layer as the local plate line 87, which isdescribed in the first embodiment of the invention. The local plate line113 is covered with an upper interlayer insulating layer including firstand second upper interlayer insulating layers 115 and 119.

A plurality of main word lines 117 may be disposed between the first andsecond upper interlayer insulating layers 115 and 119. The main wordlines 117 extend in parallel along the row direction. A main plate line123 may be located in the upper interlayer insulating layer between themain word lines 117. The main plate line 123 is electrically connectedto the local plate line 113 through a slit-type via hole 121 thatpenetrates the upper interlayer insulating layer. The slit-type via hole121 extends along the row direction (y-axis). Alternatively, the localplate line 113 may be exposed by a plurality of via holes instead of theslit-type via hole 121.

A plate line includes the local plate line 113 and the main plate line123. Alternatively, the plate line may consist of only the local plateline 113 or only the main plate line 123. In the event that the plateline is composed of only the main plate line 123, the main plate line123 is in direct contact with the common top electrode 109 of theferroelectric capacitors, which are arrayed in at least two adjacentrows, through the slit-type via hole 121.

A ferroelectric memory device according to third embodiments of theinvention is shown in FIG. 7. In these embodiments, cell transistors, alower interlayer insulating layer, and contact plugs have the sameconfiguration as those in the embodiments of FIG. 5. Further descriptionof these components will therefore be omitted in light of the foregoingdescription.

Referring to FIG. 4 and FIG. 7, a plurality of ferroelectric capacitorscovering respective ones of the contact pugs 75 is arranged on the lowerinterlayer insulating layer 74, such that the ferroelectric capacitorsare arrayed along row and column directions. Each of the ferroelectriccapacitors includes a bottom electrode 151, a common ferroelectric layerpattern 155, and a common top electrode 157. The common ferroelectriclayer pattern 155 directly contacts the bottom electrodes 151, which arearrayed in at least two adjacent rows and at least one column. In moredetail, the common ferroelectric layer pattern 155 is extended to coverthe bottom electrodes 151 of at least two adjacent rows. The common topelectrode 157 is stacked on the common ferroelectric layer pattern 155.Therefore, the common ferroelectric pattern 155 and the common topelectrode 157 extend along the row direction, similar to the localplates line PL shown in FIG. 4.

Preferably, a gap area between the bottom electrodes 151 is filled witha lower insulating layer pattern 153 a, and gap areas between the commonferroelectric layer patterns 155 and between the common top electrodes157 are filled with a top insulating layer pattern 161. A hydrogenbarrier layer pattern 159 may be disposed between the top insulatinglayer pattern 161 and at least the common ferroelectric layer pattern155.

A local plate line 163 (e.g., corresponding to the plate line PL shownin FIG. 4) is located on the common top electrode 157. The local plateline 163 is in contact with the common top electrode 157 of theferroelectric capacitors, which are arrayed in at least two adjacentrows and at least one column. In addition, the local plate line 163 maybe extended to be parallel with the row direction (y-axis). The localplate line may include the same material as the local plate line 87 ofthe embodiment of FIGS. 4 and 5. The local plate line 163 is coveredwith an upper interlayer insulating layer, which includes first andsecond upper interlayer insulating layers 165 and 169.

A plurality of main word lines 167 may be disposed between the first andsecond upper interlayer insulating layers 165 and 169. The main wordlines 167 extend in parallel along the row direction. A main plate line173 may be disposed in the upper interlayer insulating layer between themain word lines 167. The main plate line 173 is electrically connectedto the local plate line 163 through a slit-type via hole 171 thatpenetrates the upper interlayer insulating layer. The slit-type via hole171 extends along the row direction (y-axis). The local plate line 163may be exposed by a plurality of via holes instead of the slit-type viahole 171. In this case, each of the via holes exposes the common topelectrode 157 of the ferroelectric capacitors, which are arrayed in atleast two adjacent rows and at least one column.

A plate line includes the local plate line 163 and the main plate line173. Alternatively, the plate line may consist of only the local plateline 163 or only the main plate line 173. In embodiments in which theplate line is composed of only the main plate line 173, the main plateline 173 is in direct contact with the common top electrode 157 of theferroelectric capacitors, which are arrayed in at least two adjacentrows, through the slit-type via hole 171.

A method of fabricating a ferroelectric memory device according to someembodiments of the present invention will now be described more fullyhereinafter with reference to FIG. 8 through FIG. 14.

Referring now to FIG. 8, a device isolation layer 53 is formed in apredetermined area of a semiconductor substrate 51 to define a pluralityof active regions 53 a. A gate insulating layer, a gate conductivelayer, and a capping insulating layer are sequentially formed on thesemiconductor substrate 51. The capping insulating layer, the gateconductive layer, and the gate insulating layer are successivelypatterned to form a plurality of gate patterns 60 crossing over theactive regions 53 a and the device isolation layer 53. Each of the gatepatterns 60 includes a gate insulating layer pattern 55, a gateelectrode 57, and a capping insulating layer pattern 59. Preferably, thegate patterns 60 are formed along the row direction (y-axis of FIG. 4).

Using the gate patterns 60 and the device isolation layer 53 as ionimplantation masks, impurities are implanted into the active regions toform three impurity regions in each of the active regions. A centralimpurity region corresponds to a common drain region 61 d, and the otherregions correspond to source regions 61 s. Therefore, a couple of celltransistors are formed in each of the active regions. The celltransistors are arrayed on the semiconductor substrate 51 along row andcolumn directions. Then, a spacer 63 is formed on a sidewall of the gatepattern 60 using, for example, conventional processes.

Referring now to FIG. 9, a first lower interlayer insulating layer 65 isformed on the semiconductor substrate. The first lower interlayerinsulating layer 65 is patterned to form pad contact holes exposing thesource/drain regions 61 s and 61 d. A conventional technique may be usedto form storage node pads 67 s and bit line pads 67 d in the pad contactholes. The storage node pads 67 s are connected to the source regions 61s, and the bit line pad 67 d is connected to the common drain region 61d. A second lower interlayer insulating layer 69 is formed on the pads67 s and 67 d. The second lower interlayer insulating layer 69 ispatterned to form a bit line contact hole (71 a shown in FIG. 4)exposing the bit line pad 67 d. A bit line 71 is formed, contacting thebit line pad 67 d.

Referring now to FIG. 10, a third lower interlayer insulating layer 73is formed on the bit line 71. The second and third lower interlayerinsulating layers 69 and 73 are patterned to form storage node contactholes (75 a shown in FIG. 4) exposing the storage node pads 67 s. Thestorage node contact hole may be formed by a wet and/or dry etch processto increase an upper diameter thereof. Accordingly, an upper sidewall ofthe storage node contact hole may have a sloped profile, as shown in thedrawing. This is aimed at decreasing in an electrical resistance betweena lower electrode, formed in a subsequent process, and the source region61 s. Contact plugs 75 are formed in the storage node contact holes.

Referring now to FIG. 11, a conductive bottom electrode layer, aferroelectric layer, and a conductive top electrode layer aresequentially formed on the contact plugs 75 and the lower interlayerinsulating layer 74. The top electrode layer, the ferroelectric layer,and the bottom electrode layer are successively patterned to form aplurality of ferroelectric capacitors 82 (CP shown in FIG. 4) that arearrayed along row and column directions. Each of the ferroelectriccapacitors 82 includes a bottom electrode 77, a ferroelectric layerpattern 79, and a top electrode 81. Respective ones of the bottomelectrodes 77 are in contact with respective ones of the contact plugs75. Thus, respective ones of the ferroelectric capacitors 82 areelectrically connected to respective ones of the source regions 61 s. Aninsulating layer 85 is formed on the resultant structure. Prior toformation of the insulating layer 85, a conformal hydrogen barrier layer83 may be formed. Preferably, the hydrogen barrier layer 83 is made oftitanium oxide (TiO₂), aluminum oxide (Al₂O₃), silicon nitride (Si₃N₄),or combination thereof.

Referring now to FIG. 12, the insulating layer 85 and the hydrogenbarrier layer 83 are planarized to expose the top electrodes 81. Theplanarization process can be performed using, for example, a chemicalmechanical polishing (CMP) technique or an etch-back technique. Thus, ahydrogen barrier layer pattern 83 a and an insulating layer pattern 85 aare formed between the ferroelectric capacitors 82. The hydrogen barrierlayer pattern 83 a covers sidewalls of the ferroelectric capacitors 82(i.e., sidewalls of the ferroelectric layer patterns 79), therebypreventing hydrogen atoms from being injected into the ferroelectriclayer patterns 79. If hydrogen atoms are injected into the ferroelectriclayer patterns 79, characteristics of ferroelectric capacitors 82, suchas a polarization characteristic or a leakage current characteristic,may be deteriorated. As a result, the hydrogen barrier layer pattern 83a can improve characteristics of the ferroelectric capacitors 82.

A conductive lower plate layer is formed on an entire surface of thesemiconductor substrate including the insulating layer pattern 85 a. Theconductive lower plate layer may be formed of a metal, a conductivemetal oxide, a conductive metal nitride or a combination thereof. Forexample, the conductive lower plate layer can be formed of titaniumaluminum nitride (TiAlN), titanium (Ti), titanium nitride (TiN), iridium(Ir), iridium oxide (IrO₂), platinum (Pt), ruthenium (Ru), rutheniumoxide (RuO₂), aluminum or combination thereof. The conductive lowerplate layer is patterned to form local plate line 87 (PL shown in FIG.4) that extends parallel with the word lines 57 which is perpendicularto the bit line 71. The local plate line 87 directly contacts the topelectrodes 81 of the ferroelectric capacitors 82 which are arrayed intwo adjacent rows. An upper interlayer insulating layer is formed on thelocal plate line 87. The upper interlayer insulating layer is formed bysequentially stacking first and second upper interlayer insulatinglayers 89 and 93. Prior to formation of the second upper interlayerinsulating layer 93, a plurality of parallel main word lines 91 may beformed on the first upper interlayer insulating layer 89. The main wordlines are parallel to the row direction (y-axis of FIG. 4). One mainword line 91 may control four word lines 57 through a decoder.

Referring now to FIG. 13, the upper interlayer insulating layer ispatterned to form a slit-type via hole 95 exposing the local plate line87. The slit-type via hole 95 is formed between the main word lines 91,in parallel with the main word lines 91. A plurality of via holes may beformed instead of the slit-type via hole 95, each of the via holesexposing the local plate line 87 on the ferroelectric capacitors, whichare arrayed in at least two adjacent rows and at least one column.Compared with a prior art, the slit-type via hole 95 has greater width,as shown in the drawing. Nevertheless, a spacing (A) between theslit-type via hole 95 and the adjacent main word lines 91 can begreater, compared with the prior art. This can lead to a significantdecrease in the probability that the word lines 91 will be exposed, eventhough the slit-type via hole 95 is formed by wet and/or dry etch inorder to lower an aspect ratio thereof.

A conductive upper plate layer, such as a metal layer comprisingaluminum, is formed on the resultant structure, passing through theslit-type via hole 95 to contact the local plate line 87. The upperplate layer may exhibit good step coverage because the aspect ratio ofthe slit-type via hole 95 may be kept relatively low. The upper platelayer is patterned to form a main plate line 97. The main plate line 97is formed to be parallel to the row direction (y-axis). The main plateline 97 is electrically connected to the ferroelectric capacitors, whichare arrayed in at least two adjacent rows, through the local plate line87.

Modifications of the embodiments described in FIGS. 8-13 will now bedescribed with reference to FIG. 14. These modified embodiments differin the manner in which local plate lines 87 are formed. In the modifiedembodiments, not only the top electrodes 81, but also the insulatinglayer pattern 85 a therebetween, are exposed during formation of theslit-type via hole 95. Accordingly, the insulating layer pattern 85 a ispreferably made of material (e.g., silicon nitride) having an etchselectivity with respect to the upper interlayer insulating layer. Themain plate line 97 is in direct contact with the top electrodes 81 ofthe ferroelectric capacitors, which are arrayed in at least two adjacentrows.

Operations for fabricating a ferroelectric memory device according toadditional embodiments of the invention will now be described withreference to FIG. 15 through FIG. 19. In these embodiments, celltransistors, a lower interlayer insulating layer, and contact plugs canbe formed in the same manner as the embodiments described in FIGS. 8-13.

Referring now to FIG. 15, a conductive bottom electrode layer and aferroelectric layer are sequentially formed on the lower interlayerinsulating layer 74 and the contact plugs 75. The ferroelectric layerand the bottom electrode layer are successively patterned to form aplurality of bottom electrodes 101 covering the contact plugs 75, and aplurality of ferroelectric layer patterns 103 stacked on the bottomelectrodes 101. A hydrogen barrier layer 105 and a lower insulatinglayer 107 are sequentially formed on the ferroelectric layer patterns103.

Referring now to FIG. 16, the lower insulating layer 107 and thehydrogen barrier layer 105 are planarized to expose the ferroelectriclayer patterns 103. Thus, a lower insulating layer pattern 107 a and ahydrogen barrier layer pattern 105 a are formed in gaps between theferroelectric layer patterns 103 and between the bottom electrodes 101.A conductive top electrode layer is formed on the lower insulating layerpattern 107 a, the hydrogen barrier layer pattern 105 a, and theferroelectric layer patterns 103. The top electrode layer is patternedto form a common top electrode 109 that extends parallel to the wordlines 57. The common top electrode 109 covers the ferroelectric layerpatterns 103. In other words, the common top electrode 109 directlycontacts the ferroelectric layer patterns 103 of the ferroelectriccapacitors, which are arrayed in at least two adjacent and at least onecolumn.

Referring now to FIG. 17, an upper insulating layer 111 is formed on thecommon top electrode 109. The upper insulating layer 111 is patterned toform a slit-type contact hole exposing the common top electrode 109. Theprocesses for forming the upper insulating layer 111 and the slit-typecontact hole may be omitted. A conductive lower plate layer is formed,contacting the common top electrode 109 through the slit-type contacthole. The conductive lower plate layer is formed of the same materiallayer as the conductive lower plate layer which is described withrespect to the embodiments of FIGS. 4 and 5. The lower plate layer ispatterned to form a local plate line 113 (PL shown in FIG. 4). First andsecond upper interlayer insulating layers 113 and 119 are sequentiallyformed on the local plate line. A plurality of main word lines 117 maybe formed between the first and second interlayer insulating layers 113and 119. The main word lines 117 are formed in the same manner as in thepreviously described embodiments. Referring to FIG. 18, a slit-type viahole 121 is formed in the upper interlayer insulating layer. A mainplate line 123 is then formed as previously described.

Modifications of the embodiments described in FIGS. 15-18 will now bedescribed with reference to FIG. 19. The modified embodiments areidentical to the embodiments of FIGS. 15-18, except that the local plateline 115 is not formed. In this case, the slit-type via hole 121 exposesthe common top electrode 109.

A method of fabricating a ferroelectric memory device according tofurther embodiments of the invention will now be described withreference to FIG. 20 through FIG. 24. In these embodiments, celltransistors, a lower interlayer insulating layer, and contact plugs areformed in the same manner as in the previously described embodiments.

Referring now to FIG. 20, a conductive bottom electrode layer is formedon the lower interlayer insulating layer 74 and the contact plugs 75.The bottom electrode layer is patterned to form a plurality of bottomelectrodes 151 covering the contact plugs 75. A lower insulating layer153 is formed on the bottom electrodes 151.

Referring now to FIG. 21, the lower insulating layer 153 is planarizedto expose upper surfaces of the bottom electrodes 151, thus forming aninsulating layer pattern 153 a in a gap between the bottom electrodes151. A ferroelectric layer and a conductive top electrode layer aresequentially formed on the lower insulating layer pattern 153 a and thebottom electrodes 151. The upper electrode layer and the ferroelectriclayer are successively patterned to form a common ferroelectric layerpattern 155 and a common top electrode 157. The common ferroelectriclayer pattern 155 covers the bottom electrodes 151, which are arrayed inat least two adjacent rows and at least one column. Further, the commonferroelectric layer pattern 155 may be extended and formed to beparallel to the row direction (y-axis). A hydrogen barrier layer pattern159 and an upper insulating layer pattern 161 are formed in gapsadjacent the common ferroelectric pattern 155 and the common topelectrode 157.

Referring now to FIG. 22, a conductive lower plate layer is formed onthe upper insulating layer pattern 161 and the common top electrode 157.The lower plate layer may include the same material as the lower plateelectrode described with reference to the embodiments of FIGS. 4 and 5.The lower plate layer is patterned to form a local plate line 163 (PLshown in FIG. 4) covering the common top electrode 157. As a result, thelocal plate line 163 is in contact with the common top electrode 157 ofthe ferroelectric capacitors, which are arrayed in at least two adjacentrows. Preferably, the local plate line 163 is in direct contact with thecommon top electrode 157 of the ferroelectric capacitors, which arearrayed in at least two adjacent rows and at least one column.

An upper interlayer insulating layer is formed on the local plate line163. The upper interlayer insulating layer is formed by sequentiallystacking first and second upper interlayer insulating layers 165 and169. A plurality of parallel main word lines 167 may be formed betweenthe first and second upper interlayer insulating layers 165 and 169. Themain word lines 167 may be formed as in previously describedembodiments.

Referring now to FIG. 23, a slit-type via hole 171 is formed in theupper interlayer insulating layer. A conductive main plate line 173 isformed, extending through the slit-type via hole 171. The slit-type viahole 171 and the main plate line 173 may be formed as in the previouslydescribed embodiments.

A modification of the embodiments of FIGS. 20-23 will now be describedwith reference to FIG. 24. The modified embodiments are identical to theembodiments of FIGS. 20-23 except that the local plate line 163 isomitted. In this case, the slit-type via hole 171 exposes the common topelectrode 157.

FIG. 25 is a top plan view showing a modification of the embodiments ofthe invention shown in FIG. 4, and FIG. 26 is a cross-sectional view forillustrating a ferroelectric memory device and a method of fabricatingthe same, taken along the line II-II′ of FIG. 25. In these embodiments,cell transistors, lower interlayer insulating layer, contact plugs,ferroelectric capacitors and insulating layer patterns have the sameconfigurations as those in the embodiments of FIG. 5 and can be formedin the same manner as the embodiments described in FIGS. 8-11.Accordingly, further description of these components is omitted in lightof foregoing description.

Referring to FIGS. 25 and 26, a plurality of local plate patterns PP aredisposed on the ferroelectric capacitors 82 and the insulating layerpattern 85 a. The local plate patterns PP may include a metal, aconductive metal oxide, a conductive metal nitride or a combinationthereof. For example, the local plate patterns PP may include titaniumaluminum nitride (TiAlN), titanium (Ti), titanium nitride (TiN), iridium(Ir), iridium oxide (IrO₂), platinum (Pt), ruthenium (Ru), rutheniumoxide (RuO₂), aluminum or combination thereof. The local plate patternsPP are two-dimensionally arrayed along the row direction (y-axis) andthe column direction (x-axis).

In more detail, each of the local plate patterns PP covers theferroelectric capacitors, which are arrayed in at least two adjacentrows and at least one column. For example, the respective local platepatterns PP cover four ferroelectric capacitors 82, which are arrayed intwo adjacent rows and two adjacent columns as shown in FIG. 25. Therespective local plate patterns PP are disposed along the row direction(y-axis). As a result, each of the local plate patterns PP is in directcontact with the top electrodes 81, which are arrayed in at least twoadjacent rows and at least one column. The substrate including the localplate patterns PP is covered with an upper interlayer insulating layer.The upper interlayer insulating layer may comprise sequentially formedfirst and second upper interlayer insulating layers 89 and 93.

In addition, a plurality of main word lines 91 may be interposed betweenthe first and second upper interlayer insulating layers 89 and 93, asdescribed with reference to the embodiments of FIGS. 4 and 5. Generally,each of the main word lines 91 controls four word lines 57 through adecoder. A main plate line 97 is disposed in the upper interlayerinsulating layer between the main word lines 91. The main plate line 97is electrically connected to the local plate patterns PP, which arearrayed along the row direction (y-axis), through a plurality of viaholes 95 c that penetrate the upper interlayer insulating layer. Themain plate line 97 may be electrically connected to the local platepatterns PP, which are arrayed along the row direction (y-axis), throughthe slit-type via hole (95 of FIG. 4) that penetrates theupper-interlayer insulating layer.

Referring to FIGS. 25 and 26 again, a lower plate layer is formed on theentire surface of the substrate having the ferroelectric capacitors 82and the insulating layer pattern 85 a. The lower plate layer may includea metal, a conductive metal oxide, a conductive metal nitride or acombination thereof. In more detail, the lower plate layer may includetitanium aluminum nitride (TiAlN), titanium (Ti), titanium nitride(TiN), iridium (Ir), iridium oxide (IrO₂), platinum (Pt), ruthenium(Ru), a ruthenium oxide (RuO₂), aluminum or combination thereof.

The lower plate layer is patterned to form a plurality of local platepatterns PP. Each of the local plate patterns PP covers theferroelectric capacitors 82, which are arrayed in at least two adjacentrows and at least one column. For example, the respective local platepatterns PP is in direct contact with four top electrodes 81, which arearrayed in two adjacent rows and two adjacent columns. Thus, it ispossible to remarkably reduce the physical stress due to the local platepatterns PP, as compared to the first embodiment of the invention thatemploys the local plate line. In particular, in the event that lowerplate layer is formed of a material layer having high stress such as theiridium layer and/or the iridium oxide layer, the physical stress due tothe local plate patterns PP may be much lower than that due to the localplate line 87 in the embodiments of FIGS. 4 and 5. Therefore, in theevent that the local plate patterns PP are formed instead of the localplate line 87 as in this modified embodiment, the physical stressapplied to the ferroelectric capacitors 82 can be significantly reduced.As a result, it is possible to prevent the ferroelectric capacitors 82from being degraded.

An upper interlayer insulating layer is formed on the entire surface ofthe substrate having the local plate patterns PP. The upper interlayerinsulating layer is formed by sequentially forming a first upperinterlayer insulating layer and a second interlayer insulating layer 89and 93. A plurality of main word lines 91 may be formed on the firstupper interlayer insulating layer 89 prior to formation of the secondupper interlayer insulating layer 93. Here, each of the main word lines91 generally controls four word lines 57 through a decoder.

The upper interlayer insulating layer is patterned to form a pluralityof via holes 95 c that expose the local plate patterns PP. As a result,the plurality of via holes 95 c are two-dimensionally arrayed along thex-axis and the y-axis. Slit-type via holes (95 of FIGS. 5 and 13) may beformed instead of the plurality of via holes 95 c. An upper plate layersuch as a metal layer is formed on the entire surface of the substratehaving the via holes 95 c. The upper plate layer is then patterned toform a main plate line 97 that covers the plurality of via holes 95 c.The main plate line 97 is formed to be parallel with the y-axis as shownin FIG. 25.

In the drawings and specification, there have been disclosed typicalpreferred embodiments of the invention and, although specific terms areemployed, they are used in a generic and descriptive sense only and notfor purposes of limitation, the scope of the invention being set forthin the following claims.

1. A ferroelectric memory device comprising: a microelectronicsubstrate; a plurality of ferroelectric capacitors on the substrate,arranged as a plurality of rows and columns in respective row and columndirections; and a plurality of parallel plate lines overlying theferroelectric capacitors and extending along the row direction, whereina plate line contacts ferroelectric capacitors in adjacent rows.
 2. Theferroelectric memory device of claim 1, wherein the plate line contactsthe ferroelectric capacitors in at least two adjacent rows and at leastone column.
 3. The ferroelectric memory device of claim 1, wherein theferroelectric capacitors comprise an upper electrode, and wherein eachof the plate lines comprise a plurality of local plate lines that arespaced apart and arrayed in the row direction, each of the local platelines being in contact with upper electrodes of the ferroelectriccapacitors in adjacent rows.
 4. The ferroelectric memory device of claim3, wherein the local plate lines are composed of a titanium aluminumnitride layer (TiAlN), a titanium layer (Ti), a titanium nitride layer(TiN), an iridium layer (Ir), an iridium oxide layer (IrO₂), a platinumlayer (Pt), a ruthenium layer (Ru), a ruthenium oxide layer (RuO₂), analuminum layer (Al) or a combination layer thereof.
 5. The ferroelectricmemory device of claim 1, further comprising an insulating layer on theferroelectric capacitors, and wherein the plate lines comprise a mainplate line disposed on the insulating layer and contacting theferroelectric capacitors through holes in the insulating layer.
 6. Theferroelectric memory device of claim 5, wherein each of the holesexposes the ferroelectric capacitors in at least two adjacent rows andat least one column.
 7. The ferroelectric memory device of claim 1,wherein each of the ferroelectric capacitors includes a bottomelectrode, a ferroelectric layer pattern, and a top electrode, andwherein respective ones of the plate lines contact the top electrodes onrespective pairs of adjacent rows.
 8. The ferroelectric memory device ofclaim 7, further comprising an insulating layer pattern filling gapsbetween the ferroelectric capacitors.
 9. A ferroelectric memory devicecomprising: a semiconductor substrate; a plurality of ferroelectriccapacitors two-dimensionally arrayed along row and column directions onthe semiconductor substrate; and a plurality of local plate patternscovering the ferroelectric capacitors and two-dimensionally arrayedalong the row and column directions, wherein each of the local platepatterns is in direct contact with top surfaces of the ferroelectriccapacitors which are arrayed in at least two adjacent rows and at leasttwo adjacent columns.
 10. The ferroelectric memory device of claim 9,wherein the local plate patterns comprise at least one of titaniumaluminum nitride (TiAlN), titanium (Ti), titanium nitride (TiN), iridium(Ir), iridium oxide (IrO₂), platinum (Pt), ruthenium (Ru), rutheniumoxide (RuO₂), and aluminum (Al).
 11. The ferroelectric memory device ofclaim 9, wherein each of the ferroelectric capacitors comprises a bottomelectrode, a ferroelectric layer pattern and a top electrode which aresequentially stacked, each of the local plate patterns being in directcontact with top surfaces of the top electrodes which are arrayed in atleast two adjacent rows and at least two adjacent columns.
 12. Theferroelectric memory device of claim 11, wherein the respective localplate patterns is are in direct contact with the top surfaces of fourtop electrodes which are arrayed in two adjacent rows and two adjacentcolumns.
 13. The ferroelectric memory device of claim 9 furthercomprises a plurality of main plate lines which are arrayed to beparallel with the row direction, each of the main plate lines beingelectrically connected to the local plate patterns which are arrayedalong the row direction.
 14. The ferroelectric memory device of claim13, wherein each of the main plate lines is electrically connected tothe local plate patterns through a plurality of via holes or a slit-typevia hole.
 15. The ferroelectric memory device of claim 14 furthercomprises a plurality of main word lines which are disposed to beparallel with the row direction at both sides of the silt-type via holeor the via holes, the main word lines are located at a level of which ishigher than that of the local plate patterns and lower than that of themain plate lines.